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MEMS Mass Flow Sensors

www.siargo.com F ) 7/7S6022 (VA.4

This product contains no user serviceable manual, shall be free from faulty materials or

components. Do not attempt to disassemble, workmanship for 180 days for OEM products, and 365

substitute parts or perform unauthorized modifications days for non-OEM products from the date of shipment.

to the product. Doing so will forfeit the terms of the This warranty period is inclusive of any statutory

warranty and cause the liability to any damages warranty. Any repair or replacement serviced product

thereafter. It should only be serviced by authorized shall bear the same terms in this warranty.

personnel. Upon requests, Siargo will provide

Siargo makes no other warranty, express or implied

necessary technical support and/or training of the

and assumes no liability for any special or incidental

personnel.

damage or charges, including but not limited to any

damages or charges due to installation, dismantling,

Cautions for Product Applications

reinstallation or any other consequential or indirect

damages of any kind. To the extent permitted by law,

The product is designed for use with general purpose

the exclusive remedy of the user or purchaser, and the

gases such as air and nitrogen. It is advised that the

limit of Siargo's liability for any and all losses, injuries or

products are best used for non-explosive clean gases.

damages concerning the products including claims

The sensors cannot be used for gas metrology of

based on contract, negligence, tort, strictly liability or

fluoride or fluoride-containing gases. For updates of

otherwise shall be the return of products to Siargo, and

the product certification information, please contact

upon verification of Siargo to prove to be defective, at

the manufacturer. Use for other gases such as extreme

its sole option, to refund, repair or replacement of the

corrosive and toxic may cause the product

products. No action, regardless of form, may be

malfunctioning or even severe damages.

brought against Siargo more than 365 days after a

Don't expose the product's electronics other than the

cause of action has accrued. The products returned

inner flow channel to any liquids, the unit does not have

under warranty to Siargo shall be at user or

a water proof electronics. For medical sterilization

purchaser's risk of loss, and will be returned, if at all, at

procedure, please use the reference stated in this

Siargo's risk of loss. Purchasers or users are deemed

manual. Don't flow gas in conditions that can cause

to have accepted this limitation of warranty and liability,

condensing water vapor to be trapped inside the unit

which contains the complete and exclusive limited

during operation as the accuracy could be significantly

warranty of Siargo, and it shall not be amended,

influenced.

modified or its terms waived except by Siargo's sole

action.

It is suggested to design your application so that

nominal flow rate is approximately 70% of the full scale

This warranty is subject to the following exclusions:

flow rating of the sensor. Don't use a sensor with a flow

(1) Products that have been altered, modified or have

range at the extreme cases, for instance, don't use a

been subject to unusual physical or electrical

250 SLPM sensor for a 2.5 SLPM application.

circumstances indicated but not limited to those

stated in this document or any other actions which

Warranty and Liability

cannot be deemed as proper use of the products;

(Effective January 2010)

(2) Siargo does not provide any warranty on finished

goods manufactured by others. Only the original

Siargo warrants the products sold hereunder, properly

manufacturer's warranty applies;

used and properly installed under normal

(3) Products re-sold to the third parties.

circumstances and service as described in this user

This document is intended for distribution to customer(s) only. Siargo and its subsidiaries reserve the rights to

change the specifications and/or descriptions without prior notice.

Contact Information

Headquarters

Siargo Ltd.

2041 Mission College Blvd., Suite 250,

Santa Clara, California 95054 USA,

Phone: +01(408)969-0368

Email: [email protected];

Supplier in Japan

Marubeni Information Systems Co., Ltd.

Device Solutions Department

3-12-18 Shibuya,

Shibuya-ku, Tokyo 150-0002 Japan

Phone: +81-3-5778-8661

Europe:

IDENTIC Stefanie Trojan

Röhlichstraße 19

68723 Oftersheim - Germany

Tel: +49-(0)6202-923778

Mobil: +49-(0)151-19674551

Fax: +49-(0)6202-923779

Email: [email protected]

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